An introduction to the theory and practice of modern vacuum technology, with applications. Focuses on the understanding, operation, and selection of equipment for vacuum processes used in semiconductor, optical, and related technologies. This 2nd Edition has new information on components, lubrication, pump fluids, and other materials. Basic characteristics and operational procedures are given for each high-vacuum pumping system.

PARTIAL TABLE OF CONTENTS: Vacuum Technology.

Gas Properties.

Gas Flow.

Gas Release from Solids.

MEASUREMENT.

Pressure Gauges.

Flow Meters.

Pumping Speed.

Residual Gas Analyzers.

Interpretation of RGA Data.

PRODUCTION.

Mechanical Pumps.

Turbomolecular Pumps.

Diffusion Pumps.

Vacuum Pump Fluids.

Getter and Ion Pumps.

Cryogenic Pumps.

MATERIALS.

Materials in Vacuum.

Joints, Seals, and Components.

Lubrication.

SYSTEMS.

High Vacuum Pump Systems.

Ultrahigh Vacuum Systems.

High Flow Systems.

Leak Detection.

Appendices
Index